摘要
通过建立数值模型,分析了垂直腔面发射激光器相干耦合阵列单元数量、单元间距、单元间相位差对光束质量及偏转角度的影响.仿真结果表明,单元数量越多,发散角越小;单元间距越小,旁瓣强度越小;单元间相位差越大,偏转角度越大.因此,设计相干阵列时,需要尽量减小单元间距,增大阵列规模,实现单元间大相位差的控制.实验制备了3单元相干耦合阵列,通过分离电极实现了单元注入电流的独立控制以及单元间相位差的控制,最终实现二维方向上的光束操控.
The beam quality and deflection angle of vertical cavity surface emitting laser arrays dependent on element number,separation and relative phase difference were analyzed via numerical modeling analysis.According to simulated results,the divergence angle of the array varies inversely with the number of array elements.The smaller the element separation,the smaller the intensity of side lobes.The larger the phase difference between the elements,the larger the deflection angle.Therefore,it is necessary to decrease element separation,increase array scale and increase phase difference between elements for designing the coherent vertical cavity surface emitting laser arrays.In addition,3-element vertical cavity surface emitting laser arrays were designed and fabricated.Two-dimensional beam steering was achieved successfully via separate contacts which can control current injection into each element to control phase difference between elements.
引文
[1] IGA K.Surface-emitting laser-its birth and generation of new optoelectronics field[J].IEEE Journal of Selected Topics Quantum Electronics,2000,6(6):1201-1202.
[2] HARRIS J S,SULLICAN T O,SARMIENTO T,et al.Emerging applications for vertical cavity surface emitting lasers[J].Semiconductor Science Technology,2011,26(1):14010.
[3] KOYAMA F.Recent advances of VCSEL photonics[J].Journal of Lightwave Technology,2007,24(12):4502-4513.
[4] MOSER M,BRUNNER M,GAUGGEL H,et al.Continuous-wave operation of phase-coupled vertical-cavity surface emitting laser arrays[J].Applied Physics Letters,2000,77(6):2283-2285.
[5] LOCQUET A,GATARE I,PANAJOTOV K,et al.Influence of polarization mode competition on the synchronization of two unidirectionally coupled vertical-cavity surface-emitting lasers[J].Optics Letters,2007,32(12):1629-1631.
[6] LING B,KIM N H,MAWST L J,et al.Modeling,fabrication,and characterization of large aperture two-dimensional antiguided vertical-cavity surface-emitting laser arrays[J].IEEE Journal of Selected Topics Quantum Electronics,2005,11(5):968-981
[7] YOO H J,SCHERER A,HARBISON J P,et al.Fabrication of a two-dimensional phased array of vertical-cavity surface-emitting lasers[J].Applied Physics Letters,1990,56(13):1198-1200
[8] ZHOU D,MAWST L J,DAI Z.Modal properties of two-dimensional antiguided vertical-cavity surface-emitting laser6-4004110arrays[J].IEEE Journal of Quantum Electronics,2002,38(6):652-664.
[9] SIRIANID F,CHOQUETTE K D.In-phase,coherent photonic crystal vertical-cavity surface-emitting laser arrays with low divergence[J].Electronics Letters,2010,46(10):712-713.
[10] ZHOUD,MAWST L J.Two-dimensional phase-locked antiguided vertical-cavity surface-emitting laser arrays[J].Applied Physics Letters,2000,77(15):2307-2309.
[11] XUNM,XU C,XIE Y,et al.High-power in-phase coherently coupled VCSEL array based on proton implantation[J].Electronics Letters,2014,50(15):1085-1086.
[12] XUN M,XU C,XIE Y,et al.Modal properties of 2-D implant-defined coherently coupled vertical-cavity surfaceemitting laser array[J].IEEE Journal of Quantum Electronics,2015,51(1):2600106.
[13] MAOM,XU C,XIE Y,et al.Implant-defined 3×3in-phase coherently coupled vertical cavity surface emitting lasers array[J].IEEE Photonics Journal,2013,5(6):1502606.
[14] XUN M,XU C,XIE Y,et al.Beam steering in highly coherent implant-defined vertical avity surface emitting laser array[C].CLEO(2016),San Jose,California,United Stated,5-10June,2016:AF2J.3
[15] JOHNSONM T,SIRIANI D F,TAN M P,et al.High-speed beam steering with phased vertical cavity laser arrays[J].IEEE Journal of Selected Topics Quantum Electronics,2013,19(4):1701006.
[16] MA M T.Theory and application of antenna arrays[M].Wiley,New York,1974.