基于TDLAS的压力测量技术
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摘要
流体介质的分子吸收光谱谱线与介质本身的物理属性有关,蕴含信息丰富,且具有高灵敏度、响应快、抗干扰能力强等优点。结合可调谐二极管激光吸收光谱技术的压力测量方法是压力真空计量的新思路。本文分析了基于可调谐二极管激光吸收光谱法测量压力的基本原理,重点介绍了直接吸收法和波长调制法,并比较了各自的优缺点。梳理了近年国内外的主要研究进展及应用情况,在此基础上,总结了基于TDLAS的压力测量技术目前所面临的关键技术瓶颈,并对其未来主要应用领域进行了展望。
Molecular absorption spectrum of fluid medium is related to the physical properties of the medium itself,which contain abundant information and have the advantages of high sensitivity,fast response and strong anti-interference ability.The pressure measurement method combined with tunable diode laser absorption spectroscopy( TDLAS) is a new idea of pressure and vacuum metrology.In this paper,the basic principle of measurement pressure based on TDLAS is analyzed.The direct absorption spectroscopy and wavelength modulation spectroscopy are introduced,and their advantages and disadvantages are compared.The main research advances and applications at home and abroad in recent years are reviewed.On this basis,the key technical bottlenecks of pressure measurement technology based on TDLAS are summarized,and the main application fields in the future are prospected.
Molecular absorption spectrum of fluid medium is related to the physical properties of the medium itself,which contain abundant information and have the advantages of high sensitivity,fast response and strong anti-interference ability.The pressure measurement method combined with tunable diode laser absorption spectroscopy( TDLAS) is a new idea of pressure and vacuum metrology.In this paper,the basic principle of measurement pressure based on TDLAS is analyzed.The direct absorption spectroscopy and wavelength modulation spectroscopy are introduced,and their advantages and disadvantages are compared.The main research advances and applications at home and abroad in recent years are reviewed.On this basis,the key technical bottlenecks of pressure measurement technology based on TDLAS are summarized,and the main application fields in the future are prospected.
引文
[1]阚瑞峰,夏晖晖,许振宇,等.激光吸收光谱流场诊断技术应用研究与进展[J].中国激光,2018:1-26.
[2]余西龙,曾徽,林鑫,等.可调谐二极管激光吸收光谱诊断技术:原理和应用[J].气体物理,2016(5):52-63.
[3]蔡廷栋,高光珍,王敏锐,等.高温高压下基于TDLAS的二氧化碳浓度测量方法研究[J].光谱学与光谱分析,2014(7):1769-1773.
[4]聂伟,阚瑞峰,许振宇,等.基于TDLAS技术的水汽低温吸收光谱参数测量[J].物理学报,2017(20):97-102.
[5]夏晖晖.基于TDLAS技术的燃烧火焰场分布二维重建研究[D].北京:中国科学技术大学,2017.
[6]王雪梅,刘石.基于波长调制光谱技术的二氧化碳浓度测量[J].大气与环境光学学报,2017(5):356-361.
[7]郭慧.基于可调谐激光吸收光谱技术的气体检测解调系统研究[D].成都:电子科技大学,2014.
[8]邸越.基于吸收光谱波长调制技术的高速流场温度测量系统研究[D].北京:中国科学技术大学,2014.
[9]彭澎,狄长安,张永建,等.基于可调谐半导体激光吸收光谱的武器发射气体浓度在线检测研究[J].兵工学报,2018(7):1397-1403.
[10]刘建昌,邓广福.可调谐激光光谱系统在气体检测中的应用[J].电子科技,2013(12):107-109.
[11]何启欣.基于红外激光吸收光谱技术的气体检测系统研究[D].长春:吉林大学,2018.
[12]尹新.调谐激光光谱的气体分析技术研究[D].天津:天津大学,2007.
[13]Buchholz B,Afchine A,Ebert V.Rapid,Optical Measurement of the Atmospheric Pressure on a Fast Research Aircraft using Open-path TDLAS[M].2014.
[14]Peng S,Hong Y,Wang G.A Measurement Based on Tunable Diode Laser Absorption Spectroscopy for Pressure in Gas Flow[C].International Conference on Green Materials and Environmental Engineering,2014.
[15]娄南征.基于吸收光谱技术的开放环境温度在线测量与变压力CO2组分测量[D].南京:南京理工大学,2012.
[16]陈祥,阚瑞峰,杨晨光,等.基于TDLAS技术的空气气压精确测量[J].光电子·激光,2015(4):719-723.
[17]段金虎,金星,王广宇,等.基于直接吸收光谱测量气体的压强[J].物理实验,2016(4):7-11.
[18]张可可,刘世萱,陈世哲,等.基于TDLAS的二氧化碳浓度检测系统及压强补偿研究[J].仪表技术与传感器,2016(1):53-55.
[19]贾良权,刘文清,刘建国,等.温度和压强变化对二次谐波反演结果的影响[J].中国激光,2014(12):266-273.
[20]屈东胜,洪延姬,王广宇,等.基于波长调制光谱的多参数测量方法研究[J].红外与毫米波学报,2016(4):470-476.
[21]Heikkinen V,Kassamakov I,Seppa J,et al.Traceable Methods for Vertical Scale Characterization of Dynamic Stroboscopic Scanning White-light Interferometer Measurements[J].Appl Opt,2015,54(35):10397-10403.
[22]Douglass K O,Olson D A.Towards a Standard for the Dynamic Measurement of Pressure Based on Laser Absorption Spectroscopy[J].Metrologia,2016,53(3):S96-S106.
[23]Ahmed Z,Klimov N N,Douglass K,et al.Towards Photonics Enabled Quantum Metrology of Temperature,Pressure and Vacuum[J].2016.
[24]Ahmed Z,Olson D,Douglass K O.Precision Spectroscopy to Enable Traceable Dynamic Measurements of Pressure[J].Conf Lasers Electro Optics,2016.
[25]习振华,李得天,成永军,等.光学方法在真空计量中应用研究进展[J].真空与低温,2016(6):311-318.
[26]http://dx.doi.org/10.14279/depositonce-1248[R/OL].(2005-12-08).
[27]何祥林,潘勇刚.TDLAS技术的发展现状及其应用研究[J].鄂州大学学报,2017(1):102-104.
[2]余西龙,曾徽,林鑫,等.可调谐二极管激光吸收光谱诊断技术:原理和应用[J].气体物理,2016(5):52-63.
[3]蔡廷栋,高光珍,王敏锐,等.高温高压下基于TDLAS的二氧化碳浓度测量方法研究[J].光谱学与光谱分析,2014(7):1769-1773.
[4]聂伟,阚瑞峰,许振宇,等.基于TDLAS技术的水汽低温吸收光谱参数测量[J].物理学报,2017(20):97-102.
[5]夏晖晖.基于TDLAS技术的燃烧火焰场分布二维重建研究[D].北京:中国科学技术大学,2017.
[6]王雪梅,刘石.基于波长调制光谱技术的二氧化碳浓度测量[J].大气与环境光学学报,2017(5):356-361.
[7]郭慧.基于可调谐激光吸收光谱技术的气体检测解调系统研究[D].成都:电子科技大学,2014.
[8]邸越.基于吸收光谱波长调制技术的高速流场温度测量系统研究[D].北京:中国科学技术大学,2014.
[9]彭澎,狄长安,张永建,等.基于可调谐半导体激光吸收光谱的武器发射气体浓度在线检测研究[J].兵工学报,2018(7):1397-1403.
[10]刘建昌,邓广福.可调谐激光光谱系统在气体检测中的应用[J].电子科技,2013(12):107-109.
[11]何启欣.基于红外激光吸收光谱技术的气体检测系统研究[D].长春:吉林大学,2018.
[12]尹新.调谐激光光谱的气体分析技术研究[D].天津:天津大学,2007.
[13]Buchholz B,Afchine A,Ebert V.Rapid,Optical Measurement of the Atmospheric Pressure on a Fast Research Aircraft using Open-path TDLAS[M].2014.
[14]Peng S,Hong Y,Wang G.A Measurement Based on Tunable Diode Laser Absorption Spectroscopy for Pressure in Gas Flow[C].International Conference on Green Materials and Environmental Engineering,2014.
[15]娄南征.基于吸收光谱技术的开放环境温度在线测量与变压力CO2组分测量[D].南京:南京理工大学,2012.
[16]陈祥,阚瑞峰,杨晨光,等.基于TDLAS技术的空气气压精确测量[J].光电子·激光,2015(4):719-723.
[17]段金虎,金星,王广宇,等.基于直接吸收光谱测量气体的压强[J].物理实验,2016(4):7-11.
[18]张可可,刘世萱,陈世哲,等.基于TDLAS的二氧化碳浓度检测系统及压强补偿研究[J].仪表技术与传感器,2016(1):53-55.
[19]贾良权,刘文清,刘建国,等.温度和压强变化对二次谐波反演结果的影响[J].中国激光,2014(12):266-273.
[20]屈东胜,洪延姬,王广宇,等.基于波长调制光谱的多参数测量方法研究[J].红外与毫米波学报,2016(4):470-476.
[21]Heikkinen V,Kassamakov I,Seppa J,et al.Traceable Methods for Vertical Scale Characterization of Dynamic Stroboscopic Scanning White-light Interferometer Measurements[J].Appl Opt,2015,54(35):10397-10403.
[22]Douglass K O,Olson D A.Towards a Standard for the Dynamic Measurement of Pressure Based on Laser Absorption Spectroscopy[J].Metrologia,2016,53(3):S96-S106.
[23]Ahmed Z,Klimov N N,Douglass K,et al.Towards Photonics Enabled Quantum Metrology of Temperature,Pressure and Vacuum[J].2016.
[24]Ahmed Z,Olson D,Douglass K O.Precision Spectroscopy to Enable Traceable Dynamic Measurements of Pressure[J].Conf Lasers Electro Optics,2016.
[25]习振华,李得天,成永军,等.光学方法在真空计量中应用研究进展[J].真空与低温,2016(6):311-318.
[26]http://dx.doi.org/10.14279/depositonce-1248[R/OL].(2005-12-08).
[27]何祥林,潘勇刚.TDLAS技术的发展现状及其应用研究[J].鄂州大学学报,2017(1):102-104.
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