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力矩器磁场对微小加速度计非线性误差的影响
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  • 英文篇名:The Influence of Moment Magnetic Field on Nonlinear Error of Miniature Accelerometer
  • 作者:王晓东 ; 张梦迪 ; 孙屹博 ; 罗怡
  • 英文作者:WANG Xiaodong;ZHANG Mengdi;SUN Yibo;LUO Yi;Key laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology;Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology;
  • 关键词:微小加速度计 ; 力矩器 ; 磁场均匀性 ; 非线性误差
  • 英文关键词:miniature accelerometer;;torque converter;;magnetic field uniformity;;non-linear error
  • 中文刊名:CGJS
  • 英文刊名:Chinese Journal of Sensors and Actuators
  • 机构:大连理工大学辽宁省微纳米技术及系统工程重点实验室;大连理工大学精密与特种加工教育部重点实验室;
  • 出版日期:2018-07-15
  • 出版单位:传感技术学报
  • 年:2018
  • 期:v.31
  • 基金:“高档数控机床与基础制造装备”科技重大专项“高精度惯性器件微制造装备”课题项目(2013ZX04001091)
  • 语种:中文;
  • 页:CGJS201807003
  • 页数:5
  • CN:07
  • ISSN:32-1322/TN
  • 分类号:17-21
摘要
挠性摆式微小加速度计在导航系统中有广阔的应用前景,其非线性误差主要由力矩器标度因数的非线性所造成,其中力矩器磁场对其有重要影响。利用ANSYS Maxwell对力矩器磁场分布的均匀性进行了仿真,分析了力矩器加工和装配产生的偏差对于磁场均匀性的影响规律。结果表明,力矩器组件磁钢和上导磁帽对磁场影响较大。保证磁钢厚度加工偏差在±10μm以内,相对标准偏差CV值的相对误差小于5.4%。控制上导磁帽高度的加工偏差在±6μm以内,CV值的相对误差可小于4.4%。力矩器装配的同轴度偏差对于磁场均匀性及线圈受力影响较小,控制在±8μm以内即可。上述研究结果为指导加速度生产和装配工艺,提高其稳定性提供依据。
        The flexible pendulum miniature accelerometer is widely applicate in the field of navigation system. The nonlinear errors in working stability are mainly caused by the non-linearity of the scale factor of the torque converter,in which the magnetic field of the torque converter has significant influence on it. ANSYS Maxwell is used to simulate the uniformity of the magnetic field distribution of the torque converter. The influence of the error caused by the machining and assembling of the moment is analyzed. The results show that the magnetic steel and the upper magnetic cap have great influence on the magnetic field in the components of the accelerometer. The deviation of the thickness of the magnetic steel is less than±10 μm,and the relative error of the relative standard deviation CV is less than 5.4%. The machining deviation of the upper magnetic cap height within±6 μm to ensure that the relative error of the CV value less than 4.4%.The axiality tolerance of the torque device assembly has little influence on the uniformity of the magnetic field,when the assembly error controlled within±8 μm. The above results provide the theoretical basis for accelerometer of fabrication and assembly process with high stability.
引文
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