加工7075航空铝合金用金刚石涂层刀具的制备及其切削性能
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摘要
采用热丝化学气相沉积(HFCVD)技术在WC-Co8%硬质合金刀具表面制备金刚石涂层,调节甲烷浓度等沉积工艺制备了单层金刚石涂层刀具和微米金刚石涂层(1.2μm)、纳米金刚石涂层(200 nm)交替多层金刚石涂层刀具。以7075航空铝合金作为切削工件,在无润滑干切条件下测试了单层金刚石涂层刀具和多层金刚石涂层刀具的切削性能。实验结果表明,切削2 h后单层金刚石涂层刀具涂层脱落宽度达到35μm,刀刃钝化;有多层金刚石涂层刀具的刃型保持完整,涂层无脱落。对单层金刚石涂层和多层金刚石涂层平面样品进行了洛氏压痕实验。结果表明,多层金刚石涂层的脱落面积约为单层金刚石涂层脱落面积的1/5到1/10,进一步说明多层金刚石涂层有更强的抵抗裂纹产生的能力。这些结果表明,金刚石多层结构能提高涂层与基体的界面结合力,延长金刚石涂层刀具的使用寿命。
Diamond coatings were deposited on hard alloy cutting tool of WC-Co8% via hot filament chemical vapor deposition(HFCVD) technology. Two type of coatings, namely, monolayered coating consisted of microcrystalline with grain size of 1.2 μm and multi-layered coating consisted of nanocrystalline with grain size of 200 nm, were prepared by adjusting the methane concentration in the reaction chamber. Then the cutting performance of WC-Co8% cutting tools coated with the two coatings was comparatively assessed via machining 7075 aviation Al-alloy under dry cutting conditions without lubrication. The results show that after cutting for 2 h, coating partially spalled off and the tool edge became blunted for the tool with monolayer diamond coating, in the contrary, the tool edge remains intact and the coating does not fall off for the tool with multilayed diamond coating. Furthermore, Rockwell indentation test of flat samples of hard alloy with coatings revealed that the area of delamination induced by indentation for the multilayered coating is 1/5 to 1/10 of that for the monolayered one. Accordingly, the cracking resistance of the multilayered diamond coating should be better. It follows that the multilayered structure can be adopted to enhance the adhesion of diamond coatings to the substrate, thereby effectively increase the service performance of diamond coating tools.
Diamond coatings were deposited on hard alloy cutting tool of WC-Co8% via hot filament chemical vapor deposition(HFCVD) technology. Two type of coatings, namely, monolayered coating consisted of microcrystalline with grain size of 1.2 μm and multi-layered coating consisted of nanocrystalline with grain size of 200 nm, were prepared by adjusting the methane concentration in the reaction chamber. Then the cutting performance of WC-Co8% cutting tools coated with the two coatings was comparatively assessed via machining 7075 aviation Al-alloy under dry cutting conditions without lubrication. The results show that after cutting for 2 h, coating partially spalled off and the tool edge became blunted for the tool with monolayer diamond coating, in the contrary, the tool edge remains intact and the coating does not fall off for the tool with multilayed diamond coating. Furthermore, Rockwell indentation test of flat samples of hard alloy with coatings revealed that the area of delamination induced by indentation for the multilayered coating is 1/5 to 1/10 of that for the monolayered one. Accordingly, the cracking resistance of the multilayered diamond coating should be better. It follows that the multilayered structure can be adopted to enhance the adhesion of diamond coatings to the substrate, thereby effectively increase the service performance of diamond coating tools.
引文
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[13] Wei Q P, Ashfold M N R, Mankelevich Y A, et al. Diamond growth on WC-Co substrates by hot filament chemical vapor depo‐sition:Effect of filament–substrate separation[J]. Diam. Relat.Mater., 2011, 20(5-6):641
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[15] Bouzakis K D, Skordaris G, Bouzakis E, et al. Effect of the inter‐face fatigue strength of NCD coated hard metal inserts on their cutting performance in milling[J]. Diam. Relat. Mater., 2015,59:80
[16] Hanyu H, Murakami Y, Kamiya S, et al. New diamond coating with finely crystallized smooth surface for the tools to achieve fine surface finish of non-ferrous metals[J]. Surf. Coat. Tech., 2003,169(22):258
[17] Gruen D M, Liu S Z, Krauss A R, et al. Buckyball microwave plas‐mas:fragmentation and diamond-film growth[J]. J. Appl. Phys.,1994,75(3):1758
[18] Zhou D, McCauley T G, Qin L C, et al. Synthesis of nanocrystal‐line diamond thin films from an Ar-CH4 microwave plasma[J]. J.Appl. Phys., 1998, 83(1):540
[19] Zhang Y F, Zhang F, Gao Q J, et al. The roles of argon addition in the hot filament chemical vapor deposition system[J]. Diam.Relat. Mater., 2001, 10(8):1523
[20] Piazza F, Golansik A, Schulze S, et al. Transpolyacetylence chains in hydrngenated amorphous carbon films free of nanocrystalline di‐amond[J]. Appl. Phys. Lett., 2003, 82(3):358
[21] Ferrari A C, Robertson J. Resonant Raman spectroscopy of disor‐dered amorphous and diamondlike carbon[J]. Phys. Rev. B, 2001,64:075414
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[23] Ralchenko V G, Smolin A A, Pereverzev V G, et al. Diamond de‐position on steel with CVD tungsten intermediate layer[J]. Diam.Relat. Mater., 1995, 4(5):754
[24] Wang T, Xiang L. Shi W, et al. Deposition of diamond/β-Si C/co‐balt silicide composite interlayers to improve adhesion of diamond coating on WC-Co substrates by DC-Plasma Assisted HFCVD[J].Surf. Coat. Tech., 2011, 205(8-9):3027
[25] Askari S J, Chen G C, Akhtar F, et al. Adherent and low friction nano-crystalline diamond film grown on titanium using microwave CVD plasma[J]. Diam. Relat. Mater., 2008, 17(3):294
[26] Vidakis N, Antoniadis A, Bilalis N. The VDI 3198 indentation test evaluation of a reliable qualitative control for layered com‐pounds[J]. J. Mater. Process Tech., 2003, 143:481
[27] Skordaris G, Bouzakis K D, Charalampous P, et al. Effect of struc‐ture and residual stresses of diamond coated cemented carbide tools on the film adhesion and developed wear mechanisms in mill‐ing[J]. Cirp. Ann-Manuf. Techn., 2016, 65(1):101
[28] Woehrl N, Hirte T, Posth O, et al. Investigation of the coefficent of thermal expansion in nanocrystalline[J]. Diam. Relat. Mater.,2009, 18(2):224
[29] Zhao D C, Ren N. The methods of reducing intrinsic stress of su‐perhard diamond-like films[J]. Vccuum&Cryogenics, 2006, 12(1):224(赵栋才,任妮.降低超硬类金刚石薄膜应力的方法[J].真空与低温, 2006, 12(1):224)
[30] Su Y L, Kao W H. Tribological Behavior and Wear Mechanisms of TiN/TiCN/TiN multilayer Coatings[J]. Jmepeg,1998, 7(5):601
[31] Salgueiredo E, Almeida F A, Amaral M, et al. A multilayer ap‐proach for enhancing the erosive wear resistance of CVD diamond coatings[J]. Wear, 2013, 297(1):1064
[32] Shabani M, Sacramento J, Oliveira F J, et al. Multilayer CVD dia‐mond coating in the machining of an Al6061-15Vol%Al2O3Com‐posite[J]. Coatings, 2017, 7(10):165
[33] Deng F M, Chen L, Liu C, et al. Study on the cutting properties of micro-nano-and micro/nano diamond coatings[J]. Diamond&Abrasives Engineering, 2015, 35(4):1(邓福铭,陈立,刘畅等.微米、纳米及微/纳米复合金刚石涂层的切削性能研究[J].金刚石与磨料模具工程, 2015, 35(4):1)
[2] Lee S T, Lin Z, Jiang X. CVD diamond films:nucleation and growth[J]. Mat. Sci. Engr., 1999, 4(25):123
[3] Matumoto S, Sato Y, Tsutusmi M, et al. Growth of diamond parti‐cles from methane-hydrogen gas[J]. J. Mater. Sci., 1982, 17(11):3106
[4] Chen N C, Shen B, Yang G D, et al. Tribological and cutting be‐havior of silicon nitride tools coated with monolayer and multilay‐er-microcrystalline HFCVD diamond films[J]. Appl. Surf. Sci.,2013, 265(1):850
[5] Shen B, Sun F H, Zhang Z M, et al. Application of ultra-smooth composite diamond film coated WC-Co drawing dies under waterlubricating conditions[J]. Trans. Nonferrous Met. Soc. China,2013, 23(1):161
[6] Bouzakis K D, Michailidis N, Skordaris G, et al. Cutting with coat‐ed tools:Coating technologies, characterization methods and per‐formance optimization[J]. Cirp. Ann-Manuf. Techn., 2012, 61(2):703
[7] Johnston J M, Baker P, Catledge S A. Improved nanostructured di‐amond adhesion on cemented tungsten carbide with boride inter‐layers[J]. Diam. Relat. Mater., 2016,(69):114
[8] Uhlmann E, Koenig J. CVD diamond coatings on geometrically complex cutting tools[J]. Ann-Manuf. Techn., 2009, 58(1):65
[9] Hei H J, Ma J, Li X J, et al. Preparation and performance of chemi‐cal vapor deposition diamond coatings synthesized onto the ce‐mented carbide micro-end mills with a SiC interlayer[J]. Surf.Coat. Tech., 2015, 261:272
[10] Zhang J G, Wang X C, Shen B, et al. Effect of boron and silicon doping on improving the cutting performance of CVD diamond coated cutting tools in machining CFRPP[J]. Int. J. Refract.Meth., 2013, 41(11):285
[11] Zhang J G, Shen B, Sun F H, et al. Study on fabrication and cut‐ting performance of CVD diamond coated drills in machining the carbon fiber reinforced plastics[J]. Solid State Phenom., 2011,(175):239
[12] Salgueiredo E, Amaral M, Neto M A, et al. HFCVD diamond de‐position parameters optimized by a Taguchi Matrix[J]. Vacuum.,2011, 85(6):701
[13] Wei Q P, Ashfold M N R, Mankelevich Y A, et al. Diamond growth on WC-Co substrates by hot filament chemical vapor depo‐sition:Effect of filament–substrate separation[J]. Diam. Relat.Mater., 2011, 20(5-6):641
[14] Zhang J G, Zhang T, Wang X C, et al. Simulation and experimen‐tal studies on substrate temperature and gas density field in HF‐CVD diamond films growth on WC-Co drill tools[J]. Surf. Rev.Lett., 2013, 20(2):593
[15] Bouzakis K D, Skordaris G, Bouzakis E, et al. Effect of the inter‐face fatigue strength of NCD coated hard metal inserts on their cutting performance in milling[J]. Diam. Relat. Mater., 2015,59:80
[16] Hanyu H, Murakami Y, Kamiya S, et al. New diamond coating with finely crystallized smooth surface for the tools to achieve fine surface finish of non-ferrous metals[J]. Surf. Coat. Tech., 2003,169(22):258
[17] Gruen D M, Liu S Z, Krauss A R, et al. Buckyball microwave plas‐mas:fragmentation and diamond-film growth[J]. J. Appl. Phys.,1994,75(3):1758
[18] Zhou D, McCauley T G, Qin L C, et al. Synthesis of nanocrystal‐line diamond thin films from an Ar-CH4 microwave plasma[J]. J.Appl. Phys., 1998, 83(1):540
[19] Zhang Y F, Zhang F, Gao Q J, et al. The roles of argon addition in the hot filament chemical vapor deposition system[J]. Diam.Relat. Mater., 2001, 10(8):1523
[20] Piazza F, Golansik A, Schulze S, et al. Transpolyacetylence chains in hydrngenated amorphous carbon films free of nanocrystalline di‐amond[J]. Appl. Phys. Lett., 2003, 82(3):358
[21] Ferrari A C, Robertson J. Resonant Raman spectroscopy of disor‐dered amorphous and diamondlike carbon[J]. Phys. Rev. B, 2001,64:075414
[22] Williams O A. Nanocrystalline diamond[J]. Diam. Relat. Mater.,2011, 20(5):621
[23] Ralchenko V G, Smolin A A, Pereverzev V G, et al. Diamond de‐position on steel with CVD tungsten intermediate layer[J]. Diam.Relat. Mater., 1995, 4(5):754
[24] Wang T, Xiang L. Shi W, et al. Deposition of diamond/β-Si C/co‐balt silicide composite interlayers to improve adhesion of diamond coating on WC-Co substrates by DC-Plasma Assisted HFCVD[J].Surf. Coat. Tech., 2011, 205(8-9):3027
[25] Askari S J, Chen G C, Akhtar F, et al. Adherent and low friction nano-crystalline diamond film grown on titanium using microwave CVD plasma[J]. Diam. Relat. Mater., 2008, 17(3):294
[26] Vidakis N, Antoniadis A, Bilalis N. The VDI 3198 indentation test evaluation of a reliable qualitative control for layered com‐pounds[J]. J. Mater. Process Tech., 2003, 143:481
[27] Skordaris G, Bouzakis K D, Charalampous P, et al. Effect of struc‐ture and residual stresses of diamond coated cemented carbide tools on the film adhesion and developed wear mechanisms in mill‐ing[J]. Cirp. Ann-Manuf. Techn., 2016, 65(1):101
[28] Woehrl N, Hirte T, Posth O, et al. Investigation of the coefficent of thermal expansion in nanocrystalline[J]. Diam. Relat. Mater.,2009, 18(2):224
[29] Zhao D C, Ren N. The methods of reducing intrinsic stress of su‐perhard diamond-like films[J]. Vccuum&Cryogenics, 2006, 12(1):224(赵栋才,任妮.降低超硬类金刚石薄膜应力的方法[J].真空与低温, 2006, 12(1):224)
[30] Su Y L, Kao W H. Tribological Behavior and Wear Mechanisms of TiN/TiCN/TiN multilayer Coatings[J]. Jmepeg,1998, 7(5):601
[31] Salgueiredo E, Almeida F A, Amaral M, et al. A multilayer ap‐proach for enhancing the erosive wear resistance of CVD diamond coatings[J]. Wear, 2013, 297(1):1064
[32] Shabani M, Sacramento J, Oliveira F J, et al. Multilayer CVD dia‐mond coating in the machining of an Al6061-15Vol%Al2O3Com‐posite[J]. Coatings, 2017, 7(10):165
[33] Deng F M, Chen L, Liu C, et al. Study on the cutting properties of micro-nano-and micro/nano diamond coatings[J]. Diamond&Abrasives Engineering, 2015, 35(4):1(邓福铭,陈立,刘畅等.微米、纳米及微/纳米复合金刚石涂层的切削性能研究[J].金刚石与磨料模具工程, 2015, 35(4):1)