Ti/Al过渡层对共掺杂类金刚石薄膜性能的影响
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摘要
目的研究Ti/Al过渡层对不同溅射电流下的Ti/Al共掺杂DLC薄膜的成分、结构、机械性能和结合力的影响。方法采用线性离子束复合磁控溅射技术在316L基底上沉积含有Ti/Al过渡层的Ti/Al共掺杂DLC薄膜,利用场发射扫描电子显微镜(SEM)、X射线光电子能谱仪(XPS)、高分辨透射电镜(HRTEM)及共聚焦激光拉曼光谱仪分析了薄膜的界面形貌及键态结构。采用辉光放电光谱仪对样品成分进行深度分析,纳米压痕仪测量薄膜硬度及弹性模量,划痕测试系统测量膜基结合力,残余应力仪测量薄膜内应力。结果与未添加过渡层相比,添加Ti/Al过渡层对薄膜的结构和机械性能影响较小,且均在溅射电流为2.5 A时有最优的机械性能;然而,溅射电流为2.5 A时,添加过渡层使结合力从54.5 N提高到了67.2 N,提高了19%,残余应力从1.28 GPa降低到了0.25 GPa,降低了80%。结论 Ti/Al过渡层可缓解因DLC薄膜和基体的晶格匹配差异和膨胀系数不同而导致的高界面应力。在薄膜与基底界面,过渡层呈现典型柱状晶结构,可促进膜基界面间的机械互锁,显著改善薄膜与基体之间的结合力而不损伤其机械性能。
The work aims to investigate the effect of the Ti/Al transition layer on composition, bonding structure, mechanical properties, and adhesive strength of Ti/Al co-doped DLC films(Ti/Al-DLC). Ti/Al-DLC film with Ti/Al transition layer was deposited on 316 L substrates by novel linear ion beam source composited with DC magnetron sputtering process. The interface morphologies and steady structuresof the films were analyzed by field emission scanning electron microscopy(SEM), X-ray photoelectron spectroscopy(XPS), high resolution transmission electron microscopy(HRTEM), and confocal laser Raman spectroscopy. In-depth composition analysis of the sample was performed by glow discharge spectrometer, and the nano-indentation, scratch tester system, and residual stress meter were used to evaluate the hardness and elastic modulus, adhesive strength, and internal stress, respectively. Compared to the film without transition layer, the film with Ti/Al transition layer was slightly affected in the structure and mechanical properties and the optimal mechanical properties were achieved at the sputtering current of 2.5 A. When the sputtering current was 2.5 A, the addition of a Ti/Al transition layer increased the adhesive strength from 54.5 N to 67.2 N, which increased by 19% compared to the film without transition layer. Moreover, the residual stress decreased from 1.28 GPa to 0.25 GPa, which decreased by 80% significantly. The Ti/Al transition layer can further reduce the difference in lattice strain between the DLC film and the substrate and the high interfacial stress caused by the different expansion coefficients. The typical columnar crystal structure for the transition layer formed between the film and the substrate can promote the mechanical interaction between the film-based interfaces and significantly improve the adhesion between the film and the substrate without damaging the mechanical properties.
The work aims to investigate the effect of the Ti/Al transition layer on composition, bonding structure, mechanical properties, and adhesive strength of Ti/Al co-doped DLC films(Ti/Al-DLC). Ti/Al-DLC film with Ti/Al transition layer was deposited on 316 L substrates by novel linear ion beam source composited with DC magnetron sputtering process. The interface morphologies and steady structuresof the films were analyzed by field emission scanning electron microscopy(SEM), X-ray photoelectron spectroscopy(XPS), high resolution transmission electron microscopy(HRTEM), and confocal laser Raman spectroscopy. In-depth composition analysis of the sample was performed by glow discharge spectrometer, and the nano-indentation, scratch tester system, and residual stress meter were used to evaluate the hardness and elastic modulus, adhesive strength, and internal stress, respectively. Compared to the film without transition layer, the film with Ti/Al transition layer was slightly affected in the structure and mechanical properties and the optimal mechanical properties were achieved at the sputtering current of 2.5 A. When the sputtering current was 2.5 A, the addition of a Ti/Al transition layer increased the adhesive strength from 54.5 N to 67.2 N, which increased by 19% compared to the film without transition layer. Moreover, the residual stress decreased from 1.28 GPa to 0.25 GPa, which decreased by 80% significantly. The Ti/Al transition layer can further reduce the difference in lattice strain between the DLC film and the substrate and the high interfacial stress caused by the different expansion coefficients. The typical columnar crystal structure for the transition layer formed between the film and the substrate can promote the mechanical interaction between the film-based interfaces and significantly improve the adhesion between the film and the substrate without damaging the mechanical properties.
引文
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[30]LEE K R,EUN K Y,KIM I,et al.Design of W buffer layer for adhesion improvement of DLC films on tool steels[J].Thin solid films,2000,377-378:261-268.
[31]ZHANG G,YAN P,WANG P,et al.The preparation and mechanical properties of Al-containing a-C:H thin films[J].Journal of physics D:Applied physics,2007,40(21):6748-6753.
[32]HAN X,ZHENG J,ZHANG S,et al.Microstructure and tribological properties of Al-DLC coatings in water[J].Tribology,2017,37(3):310-317.
[33]WANG Q,ZHOU F,ZHOU Z,et al.Influence of Ti content on the structure and tribological properties of Ti-DLCcoatings in water lubrication[J].Diamond&related materials,2012,25(18):163-175.
[34]GUO T,KONG C,LI X,et al.Microstructure and mechanical properties of Ti/Al co-doped DLC films:Dependence on sputtering current,source gas,and substrate bias[J].Applied surface science,2017,410:51-59.
[35]ROBERTSON J.Diamond-like amorphous carbon[J].Materials science&engineering reports,2002,37(4):129-281.
[36]SAKHAROVA N A,FERNANDES J V,OLIVEIRA M C,et al.Influence of ductile interlayers on mechanical behaviour of hard coatings under depth-sensing indentation:A numerical study on TiAlN[J].Journal of materials science,2010,45(14):3812-3823.
[37]TANG C,STEINBRUECK M,STUEBER M,et al.Deposition,characterization and high-temperature steam oxidation behavior of single-phase Ti2AlC-coated zircaloy-4[J].Corrosion science,2018,135:87-98.
[2]BEWILOGUA K,HOFMANN D.History of diamondlike carbon films-From first experiments to worldwide applications[J].Surface&coatings technology,2014,242(4):214-225.
[3]DWIVEDI N,KUMAR S,CAREY J D,et al.Influence of silver incorporation on the structural and electrical properties of diamond-like carbon thin films[J].Acs applied materials&interfaces,2013,5(7):2725-2732.
[4]BAYON R,IGARTUA A,GONZALEZ J J,et al.Influence of the carbon content on the corrosion and tribocorrosion performance of Ti-DLC coatings for biomedical alloys[J].Tribology international,2015,88:115-125.
[5]NIU J,LIU D,OU Y,et al.Deposition of large-area and protective diamond-like carbon coatings on glass substrates by low-pressure dielectric barrier discharges[J].Chemical vapor deposition,2010,16(7-9):203-205.
[6]BASMAN N,UZUN R,GOCER E,et al.Electrodeposition of Si-DLC nanocomposite film and its electronic application[J].Microsystem technologies,2018,24(5):2287-2294.
[7]邓乔元,张腾飞,武冰洁,等.类金刚石薄膜在人工关节摩擦配副表面改性的应用[J].表面技术,2016,45(5):1-7.DENG Q Y,ZHANG T F,WU B J,et al.Diamond-like carbon film and its application on articular surface of artificial joint for increasing wear resistance[J].Surface technology,2016,45(5):1-7.
[8]SHI W L,WEI X T,ZHANG W,et al.Developments and applications of diamond-like carbon[J].Applied mechanics&materials,2017,864:14-24.
[9]PMM H,MNM N,BASSO F G,et al.Analyses of biofilm on implant abutment surfaces coating with diamond-like carbon and biocompatibility[J].Brazilian dental journal,2017,28(3):317-323.
[10]薛群基,王立平.类金刚石碳基薄膜材料[M].北京:科学出版社,2012:447.XUE Q J,WANG L P.Diamond-like carbon-based film material[M].Beijing:Science Press,2012:447.
[11]LEJEUNE M,BENLAHSEN M,BOUZERAR R.Stress and structural relaxation in amorphous hydrogenated carbon films[J].Applied physics letters,2004,84(3):344-346.
[12]GASSNER G,MAYRHOFER P H,MITTERER C,et al.Structure-property relations in Cr-C/a-C:H coatings deposited by reactive magnetron sputtering[J].Surface&coatings technology,2005,200(1-4):1147-1150.
[13]GASSNER G,MAYRHOFER P H,PATSCHEIDER J,et al.Thermal stability of nanocomposite CrC/a-C:H thin films[J].Thin solid films,2007,515(13):5411-5417.
[14]WANG A Y,LEE K R,AHN J P,et al.Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique[J].Carbon,2006,44(9):1826-1832.
[15]DAI W,ZHENG H,WU G,et al.Effect of bias voltage on growth property of Cr-DLC film prepared by linear ion beam deposition technique[J].Vacuum,2010,85(2):231-235.
[16]DAI W,KE P,MOON M W,et al.Investigation of the microstructure,mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method[J].Thin solid films,2012,520(19):6057-6063.
[17]PU J,ZHANG G,WAN S,et al.Synthesis and characterization of low-friction Al-DLC films with high hardness and low stress[J].Journal of composite materials,2013,49(2):199-207.
[18]AHMED M H,BYRNE J A.Effect of surface structure and wettability of DLC and N-DLC thin films on adsorption of glycine[J].Applied surface science,2012,258(12):5166-5174.
[19]DAMASCENO J C,JR S S C,JR F L F,et al.Deposition of Si-DLC films with high hardness,low stress and high deposition rates[J].Surface&coatings technology,2000,133(11):247-252.
[20]DAI Y F,JIANG M F,YANG Y S,et al.Influence of source gas flow ratio on the proteins adsorbability of F-DLC film[J].Acta physica sinica,2011,60(11):2509-2515.
[21]NOSHIRO J,WATANABE S,SAKURAI T,et al.Deposition of WS2/DLC nanocomposite films and their tribological properties[J].Journal of the surface finishing society of Japan,2005,56(9):535-540.
[22]TAKENO T,ABE S,ADACHI K,et al.Deposition and structural analyses of molybdenum-disulfide(MoS2)-amorphous hydrogenated carbon(a-C:H)composite coatings[J].Diamond&related materials,2010,19(5):548-552.
[23]YANG S,CAMINO D,JONES A H S,et al.Deposition and tribological behavior of sputtered carbon hard coatings[J].Surface&coatings technology,2000,124(2):110-116.
[24]CHANG C L,YANG F C,CHANG T M,et al.Effect of insert mid-frequency pulses on I-V characterisation,deposition rates and properties of nc-WC/a-C:H films prepared by superimposed HiPIMS process[J].Surface&coatings technology,2018,350(9):977-984.
[25]卓国海,柯培玲,李晓伟,等.不同过渡层对DLC薄膜力学性能和摩擦学性能的影响[J].中国表面工程,2015,28(6):39-47.ZHUO G H,KE P L,LI X W,et al.Influences of different interlayers on mechanical and tribological properties of DLC films[J].China surface engineering,2015,28(6):39-47.
[26]BEWILOGUA K,COOPER C V,SPECHT C,et al.Effect of target material on deposition and properties of metal-containing DLC(Me-DLC)coatings[J].Surface&coatings technology,2000,127(2):223-231.
[27]DAI M J,WEI C B,ZHOU K S,et al.Properties of W/DLC/W-S-C composite films fabricated by magnetron sputtering[J].Transactions of nonferrous metals society of China,2015,25(9):3002-3011.
[28]LI X W,GUO P,SUN L,et al.Ti/Al co-doping induced residual stress reduction and bond structure evolution of amorphous carbon films:An experimental and ab initio study[J].Carbon,2017,111:467-475.
[29]KONG C,GUO P,SUN L,et al.Tribological mechanism of diamond-like carbon films induced by Ti/Al co-doping[J].Surface&coatings technology,2018,342:167-177.
[30]LEE K R,EUN K Y,KIM I,et al.Design of W buffer layer for adhesion improvement of DLC films on tool steels[J].Thin solid films,2000,377-378:261-268.
[31]ZHANG G,YAN P,WANG P,et al.The preparation and mechanical properties of Al-containing a-C:H thin films[J].Journal of physics D:Applied physics,2007,40(21):6748-6753.
[32]HAN X,ZHENG J,ZHANG S,et al.Microstructure and tribological properties of Al-DLC coatings in water[J].Tribology,2017,37(3):310-317.
[33]WANG Q,ZHOU F,ZHOU Z,et al.Influence of Ti content on the structure and tribological properties of Ti-DLCcoatings in water lubrication[J].Diamond&related materials,2012,25(18):163-175.
[34]GUO T,KONG C,LI X,et al.Microstructure and mechanical properties of Ti/Al co-doped DLC films:Dependence on sputtering current,source gas,and substrate bias[J].Applied surface science,2017,410:51-59.
[35]ROBERTSON J.Diamond-like amorphous carbon[J].Materials science&engineering reports,2002,37(4):129-281.
[36]SAKHAROVA N A,FERNANDES J V,OLIVEIRA M C,et al.Influence of ductile interlayers on mechanical behaviour of hard coatings under depth-sensing indentation:A numerical study on TiAlN[J].Journal of materials science,2010,45(14):3812-3823.
[37]TANG C,STEINBRUECK M,STUEBER M,et al.Deposition,characterization and high-temperature steam oxidation behavior of single-phase Ti2AlC-coated zircaloy-4[J].Corrosion science,2018,135:87-98.