基于三维光电传感器的接触式探头优化设计
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摘要
文章设计了一种适用于微纳米三坐标测量机(coordinate measuring machine,CMM)的光学接触式探头,介绍了该探头的结构和原理,并建立了探头的灵敏度模型;依据三维方向等刚度和等灵敏度的原则,得出了探头结构的最优参数;对探头刚度进行仿真验证,并对探头在三维方向上的灵敏度和重复性进行了测试。实验结果表明,探头在三维方向灵敏度约为0.26 V/μm,灵敏度近似相等且线性度良好,重复性优于14 nm。
An optical touch probe for micro/nano coordinate measuring machine(CMM) was designed. The structure and the principle of the probe were introduced, and the sensitivity model was established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The sensitivity and repeatability of the probe were tested. The experimental results show that the probe has uniform sensitivity(about 0.26 V/μm) and good linearity in 3D, and the repeatability of the probe is less than 14 nm.
An optical touch probe for micro/nano coordinate measuring machine(CMM) was designed. The structure and the principle of the probe were introduced, and the sensitivity model was established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The sensitivity and repeatability of the probe were tested. The experimental results show that the probe has uniform sensitivity(about 0.26 V/μm) and good linearity in 3D, and the repeatability of the probe is less than 14 nm.
引文
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[12]HUGHES E B,WILSON A,PEGGS G N.Design of high accuracy CMM based on multi-lateration techniques[J].CIRP Annals Manufacturing Technology,2000,49(1):391-392.
[13]FAN K C,CHENG F,WANG W,et al.A scanning contact probe for a micro-coordinate measuring machine(CMM)[J].Measurement Science and Technology,2010,21(5):054002.
[2]蒋庄德,王海容,王朝晖.纳米测量技术与微型智能仪器[J].中国机械工程,2000,11(3):248-251.
[3]徐毅,高思田,王春艳,等.微机械及纳米计量科学[J].中国机械工程,2001,11(3):272-274.
[4]李瑞君,钱剑钊,龚伟,等.基于DVD光学读取头的大量程高精度扫面探头[J].合肥工业大学学报(自然科学版),2011,34(12):1761-1764.
[5]向萌,李瑞君,李心愿,等.接触触发式探头结构优化设计[J].计量学报,2016,37(3):230-234.
[6]高伟,陈晓怀,李瑞君,等.一种基于DVD读取头的非接触触发探头[J].计量学报,2014,35(1):30-33.
[7]黄强先,余惠娟,黄帅,等.微纳米三坐标测量机测头的研究进展[J].中国机械工程,2013,24(9):1264-1272.
[8]陈叶金,范光照,刘玉圣.微器件表面3D形貌的新型微/纳米探头测量系统[J].计量学报,2006,27(1):13-17.
[9]MURUGARAJAN A,SAMUEL G L.Characterization of dimensional features of mesoscale component using capacitive sensor[J].The International Journal of Advanced Manufacturing Technology,2015,77(9/10/11/12):1831-1849.
[10]LEI L,DENG L,FAN G,et al.A 3D micro tactile sensor for dimensional metrology of micro structure with nanometer precision[J].Measurement,2014,48:155-161.
[11]MELI F,KüNG A,THALMANN R.Ultraprecision microCMM using a low force 3Dtouch probe[J].Measurement Science and Technology,2007,18(2):319-327.
[12]HUGHES E B,WILSON A,PEGGS G N.Design of high accuracy CMM based on multi-lateration techniques[J].CIRP Annals Manufacturing Technology,2000,49(1):391-392.
[13]FAN K C,CHENG F,WANG W,et al.A scanning contact probe for a micro-coordinate measuring machine(CMM)[J].Measurement Science and Technology,2010,21(5):054002.