X-ray phase analysis of copper oxides films obtained by DC reactive magnetron sputtering

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• 作者：A. E. Lapshin ; V. V. Karzin ; V. I. Shapovalov ; P. B. Baikov
• 关键词：films ; copper oxides ; reactive magnetron sputtering method ; X ; ray phase analysis
• 刊名：Glass Physics and Chemistry
• 出版年：2016
• 出版时间：January 2016
• 年：2016
• 卷：42
• 期：1
• 页码：116-117
• 全文大小：206 KB
• 参考文献：1.Ping, Z., Yurong, Z., Qingbo, Y., Fengzhen, L., Jingwen, L., and Gangqiang, D., A combined experimental–computational study on nitrogen doped Cu2O as the wide-spectrum absorption material, J. Semicond., 2014, vol. 35, no. 5, article 103001 (5 pages).
  2.Zoolfakar, A.S., Rani, R.A., Morfa, A.J., O’Mullaned, A.P., and Kalantar-zadeh, K., Nanostructured copper oxide semiconductors: A perspective on materials, synthesis methods, and applications, J. Mater. Chem. C, 2014, vol. 2, no. 27, pp. 5247–5270.CrossRef
  3.Shapovalov, V.I., Nanopowders and films of titanium oxide for photocatalysis: A review, Glass Phys. Chem., 2010, vol. 36, no. 2, pp. 121–157.CrossRef
  4.Komlev, A.E., Shapovalov, V.I., and Shutova, N.S., Magnetron discharge in an argonoxygen mixture for deposition of a titanium oxide film, Tech. Phys., 2012, vol. 57, no. 7, pp. 1030–1033.CrossRef
  5.Barybin, A.A. and Shapovalov, V.I., Nonisothermal chemical model of reactive sputtering, J. Appl. Phys., 2007, vol. 101, no. 10, article 054905 (10 pages).
  6.Barybin, A.A., Zavyalov, A.V., and Shapovalov, V.I., A nonisothermal physicochemical model of synthesis of oxynitrides by reactive sputtering techniques, Glass Phys. Chem., 2012, vol. 38, no. 4, pp. 396–401.CrossRef
  7.Levitskii, V.S., Shapovalov, V.I., Komlev, A.E., Zav’yalov, A.V., Vit’ko, V.V., Komlev, A.A., and Shutova, E.S., Raman scattering of light in copper oxide films deposited by reactive magnetron sputtering, Phys. Lett., 2015, vol. 41, no. 11, pp. 1094–1096.
  
• 作者单位：A. E. Lapshin (1)
  V. V. Karzin (2)
  V. I. Shapovalov (2)
  P. B. Baikov (2)
  
  1. Institute of Silicate Chemistry, Russian Academy of Sciences, nab. Adm. Makarova 2, St. Petersburg, 199034, Russia
  2. St. Petersburg Electrotechnical University LETI, ul. Professora Popova 5, St. Petersburg, 197376, Russia
  
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Ceramics,Glass,Composites,Natural Materials
  Characterization and Evaluation Materials
  Materials Science
  Physical Chemistry
  Russian Library of Science
  
• 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
• ISSN：1608-313X

文摘

The phase composition of the copper oxides films obtained by DC reactive magnetron sputtering at oxygen partial pressures of 0.06, 0.10, and 0.16 mTorr is studied by X-ray phase analysis (XRPA) before and after their heat treatment within the range 300–550°C. It is found that the original phase compositions of the films of each lot are different; after the heat treatment at 550°C, all the films contained only CuO of a monoclinic structure.