Reconstruction of Thickness and Composition of Stratified Materials by Means of 3D Micro X-ray Fluorescence Spectroscopy

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• 作者：Ioanna Mantouvalou ; Wolfgang Malzer ; Ina Schaumann ; Lars L&uuml ; hl ; Rainer Dargel ; Carla Vogt ; Birgit Kanngiesser
• 刊名：Analytical Chemistry
• 出版年：2008
• 出版时间：February 1, 2008
• 年：2008
• 卷：80
• 期：3
• 页码：819 - 826
• 全文大小：270K
• 年卷期：v.80,no.3(February 1, 2008)
• ISSN：1520-6882

文摘

The recently developed 3D micro X-ray fluorescencespectroscopy (3D Micro-XRF) enables three-dimensionalresolved, nondestructive investigation of elemental distribution in samples in the micrometer regime. Establishing a reliable quantification procedure is the preconditionto render this spectroscopic method into a true analyticaltool. One prominent field of application is the investigationof stratified material. A procedure for the quantitativereconstruction of the composition of stratified material bymeans of 3D Micro-XRF is proposed and validated. Withthe procedure, it is now possible to determine nondestructively the chemical composition and the thicknessof layers. As no adequate stratified reference sampleswere available for validation, stratified reference materialhas been developed that is appropriate for 3D Micro-XRFor other depth-sensitive X-ray techniques.