In Situ Localized Growth of Porous Tin Oxide Films on Low Power Microheater Platform for Low Temperature CO Detection
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- 作者：Hu Long ; Anna Harley-Trochimczyk ; Tianyi He ; Thang Pham ; Zirong Tang ; Tielin Shi ; Alex Zettl ; William Mickelson ; Carlo Carraro ; Roya Maboudian
- 刊名：ACS Sensor
- 出版年：2016
- 出版时间：April 22, 2016
- 年：2016
- 卷：1
- 期：4
- 页码：339-343
- 全文大小：461K
- ISSN：2379-3694
文摘
This paper reports a facile method for creating a nanostructured metal oxide film on a low power microheater sensor platform and the direct realization of this structure as a gas sensor. By fast annealing the deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in situ and locally on the sensor platform. With only minimal processing, a high performance, miniaturized gas sensor is ready for use. A carbon monoxide sensor using the in situ synthesized porous tin oxide (SnO2) sensing film is made as a demonstration of this technique. The sensor exhibits a low detection limit and fast response and recovery time at a low operating temperature. This facile fabrication method is highly flexible and has great potential for large-scale gas sensor fabrication.