Tuning Optical Properties of Al2O3/ZnO Nanolaminates Synthesized by Atomic Layer Deposition

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• 作者：Adib Abou Chaaya ; Roman Viter ; Ieva Baleviciute ; Mikhael Bechelany ; Arunas Ramanavicius ; Zanda Gertnere ; Donats Erts ; Valentyn Smyntyna ; Philippe Miele
• 刊名：Journal of Physical Chemistry C
• 出版年：2014
• 出版时间：February 20, 2014
• 年：2014
• 卷：118
• 期：7
• 页码：3811-3819
• 全文大小：442K
• ISSN：1932-7455

文摘

Nanolaminates are of great interest for their unique properties such as high dielectric constants and advanced mechanical, electrical, and optical properties. Here we report on the tuning of optical and structural properties of Al₂O₃/ZnO nanolaminates designed by atomic layer deposition (ALD). Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was performed by transmittance and photoluminescence (PL) spectroscopy. Complex study of monolayer properties was performed by ellipsometry. Optical constants for Al₂O₃ and ZnO monolayer were calculated. The band gap of ZnO single layers and the excitonic PL peak position were shifted to the UV region related to quantum confinement effects. No peaks in the UV region were observed in nanolaminates with 2 nm ZnO single layer thickness due to fully depleted region in small crystalline grains (<2 nm). The improved room temperature photoluminescence of nanolaminates makes them prominent materials for optical biosensors applications.