MEMS-based fabrication of high-performance inductors with back hollow structure and ferromagnetic film

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• 作者：Gang Wang^a ; ^b ; Houfang Liu^a ; ^b ; ; Haochuan Qiu^a ; ^b ; Keyu Ning^a ; ^b ; Yi Yang^a ; ^b ; Xiaoli Li^c ; Xiaohong Xu^c ; Marion Lavanant-Jambert^d ; Sé ; bastien Petit-Watelot^d ; Yuan Lu^d ; Tian-Ling Ren^a ; ^b ; ^{RenTL@tsinghua.edu.cn} ; ^{hfliu@tsinghua.edu.cn}
• 关键词：MEMS ; On-chip inductor ; Back hollow structure ; Ferromagnetic resonance ; Ferromagnetic thin film
• 刊名：Microelectronic Engineering
• 出版年：2017
• 出版时间：25 January 2017
• 年：2017
• 卷：168
• 期：Complete
• 页码：5-9
• 全文大小：737 K
• 卷排序：168

文摘

On-chip inductor with back hollow structure and CoFeB/ZnO/CoFeB film is proposed. The magnetization dynamic response of CoFeB/ZnO/CoFeB film is investigated. The enhancement of inductance and Q-factor of magnetic inductor is achieved.