RBS and NRA analyses of lithium inserted amorphous Li_1+xNiVO₄ films

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• 作者：M.V. Reddy ; B. Pecquenard ; P. Vinatier ; C. Wannek ; A. Levasseur and P. Moretto
• 关键词：RBS ; NRA ; LiNiVO₄ films ; Li-insertion
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：2006
• 出版时间：May 2006
• 年：2006
• 卷：246
• 期：2
• 页码：397-401
• 全文大小：315 K

文摘

rf-Magnetron sputtered LiNiVO₄ thin film was used as a negative electrode for lithium microbatteries applications. Their film composition and thickness were analyzed by Rutherford backscattering spectroscopy (RBS) and nuclear reaction analysis (NRA) technique by using ⁴He⁺, ⁷Li(p α) ⁴He reaction respectively. The structure, surface roughness and homogeneity of these films have been investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and auger electron spectroscopy (AES) techniques. The amount of lithium inserted into the LiNiVO₄ films was analyzed by RBS and NRA studies. The results are comparable to those obtained from the electro-analytical technique (galvanostatic method), indicating that ion beam techniques are complementary tools for the analysis of lithium metal oxide thin films.