Three-dimensional imaging of individual point defects using selective detection angles in annular dark field scanning transmission electron microscopy

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• 作者：Jared M. Johnson ; Soohyun Im ; Wolfgang Windl ; Jinwoo Hwang ; ^{hwang.458@osu.edu}
• 关键词：Scanning transmission electron microscopy ; Point defects ; Electron channeling ; Atomic scale 3D information
• 刊名：Ultramicroscopy
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：172
• 期：Complete
• 页码：17-29
• 全文大小：1836 K
• 卷排序：172

文摘

A new electron microscopy technique that can visualize 3D position of point defect is proposed. The technique relies on the electron de-channeling signals at low scattering angles. The technique enables precise determination of the depth of vacancies and lighter impurity atoms.