Fabrication of microlens array on silicon surface using electrochemical wet stamping technique
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- 作者：Lei-Jie Laia ; lailj@alumni.sjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Hang Zhoub ; Li-Min Zhub
- 关键词：Microlens array ; Electrochemical wet stamping ; Agarose stamp ; Anodic dissolution ; Silicon
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：28 February 2016
- 年：2016
- 卷：364
- 期：Complete
- 页码：442-445
- 全文大小：1593 K
文摘
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A micromachining method of electrochemical wet stamping (E-WETS) is studied.
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The potential of the p-Si electrode is chosen for the electropolishing.
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Microlens array is fabricated on p-Si surface by E-WETS with high precision.
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The machining deviations and the surface roughness are evaluated.