High temperature characteristics of AlN film SAW sensor integrated with TC4 alloy substrate
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- 作者：Lin ShuAuthor Vitae ; Bin Peng ; bpeng@uestc.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Yilin CuiAuthor Vitae ; Dongdong GongAuthor Vitae ; Xingzhao LiuAuthor Vitae ; Wanli ZhangAuthor Vitae
- 关键词：Surface acoustic wave ; Layered structure ; Temperature coefficient of frequency ; Aluminum nitride ; Metal substrate
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：1 October 2016
- 年：2016
- 卷：249
- 期：Complete
- 页码：57-61
- 全文大小：1591 K
文摘
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AlN film SAW devices were integrated on TC4 alloy without any adhesives.
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TCF of the SAW devices was dependent on the thickness of AlN film.
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K2 of the SAW devices increase with increasing temperature.
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Thermal hysteresis errors of the prepared SAW devices were below 4%.
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AlN film SAW device integrated on TC4 alloy has good thermal stability up to 350 °C.