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Buffer effects of two functional groups against pH variation at aminosilanized Electrolyte-Oxide-Semiconductor (EOS) capacitor
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文摘
pH sensitivity variations of Electrolyte-Oxide-Semiconductor capacitor with both silanol and amine groups are analyzed in terms of their functional group ratio theoretically and experimentally. The phenomena causing the pH sensitivity variations are explained by the buffer effect of each functional group by using Henderson-Hasselbalch equation. The influence of O2 plasma and solvent on silanized structure and density are analyzed by X-ray photoelectron spectroscopy measurements.

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