Structure and Electrical Characteristics of Zinc Oxide Thin Films Grown on Si (111) by Metal-organic Chemical Vapor Deposition

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• 作者：Yunfeng Wu ; Dongping Liu ; Naisen Yu ; Yu ; a Liu ; Hongwei Liang ; Guotong Du
• 关键词：ZnO thin films ; Metal-organic chemical vapor deposition ; Conductive atomic force microscopy ; Scanning electron microscopy
• 刊名：Journal of Materials Science & Technology
• 出版年：2013
• 出版时间：September, 2013
• 年：2013
• 卷：29
• 期：9
• 页码：830-834
• 全文大小：1505 K

文摘

ZnO thin films were grown on Si (111) substrates by low-pressure metal-organic chemical vapor deposition. The crystal structures and electrical properties of as-grown sample were investigated by scanning electron microscopy (SEM) and conductive atomic force microscopy (C-AFM). It can be seen that with increasing growth temperature, the surface morphology of ZnO thin films changed from flake-like to cobblestones-like structure. The current maps were simultaneously recorded with the topography, which was gained by C-AFM contact mode. Conductivity for the off-axis facet planes presented on ZnO grains enhanced. Measurement results indicate that the off-axis facet planes were more electrically active than the c-plane of ZnO flakes or particles probably due to lower Schottky barrier height of the off-axis facet planes.