Physisorption lifetimes of Cl2 as well as Cs(4d) and Cl(2p) XPS spectra have been measured on the Cl/Cs/Si(100) surfaces. As the Cs coverage is increased and the surface temperature is lowered, trapping-desorption scattering emerges to show the fast and slow detrapping modes. The activation energies and the pre-exponential factors for detrapping become large with increasing Cs coverage. The appearance of two peaks in the observed Cs(4d) XPS spectra suggests two types of Cs adatoms. Local surface dipoles due to the Cs adatoms may be responsible for the difference in the depth of the physisorption wells.